design of mems single pole double throw switch based on pzt
Arko Mukherjee,Abhijeet Pasumarthy,Aminul Islam
Published in International Journal of Advanced Research in Electrical and Electronics Engineering
ISSN: 2321-4775 Impact Factor:1.6 Volume:3 Issue:2 Year: 14 February,2016 Pages:84-87
Abstract
With technological advancement in modern era, sizes of various tools used in various engineering applications has become smaller and smaller. Especially, the field of micro- engineering has gained a tremendous impetus. Working at micro-level has been a challenging job in the field of engineering for quite some time. This paper proposes the design of a 3-dimensional microelectromechanical system (3-D MEMS) model of a inverse piezo- electrically actuated single pole- double throw switch. Inverse Piezoelectric actuation has the advantage of fast response and reasonable power consumption. This paper also focuses on the optimization of the structure which will yield the best possible switching displacement (more displacement) for a particular voltage applied to the piezo – material. We have used Finite Element Method (FEM) of COMSOL Multiphysics version 4.4 to analyze all the structures. Various models have been tried out, each being subjected to numerous dimensional, structural and material variations, and the structure with best possible output has been put forward. All the parametric studies, which included total displacement of the piezo-material, stress developed has been carried out by linearly varying the voltage from 0-10 Volts.
Kewords
Keywords— Single Pole - Double Throw Piezo - Switch (SPDTPS), Finite Element Method (FEM), Meshing, MEMS, Piezoelectric actuation.
Reference
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